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Entegris is a leader in specialty chemicals and advanced materials solutions for the microelectronics industry. In 2018, Entegris acquired Particle Sizing Systems, a company specializing in particle sizing instrumentation for liquid applications in the semiconductor and life sciences industries.
With PSS technology, Entegris offers customers the ability to perform on-line, real-time particle size analysis directly in the fluid flow process. Automating the monitoring process can lead to the application of more efficient solutions, such as proper filter selection and system maintenance. This ability to intervene with these solutions avoids costly performance excursions. From wet to dry, in-line to the research lab – we’ve designed a complete family of modular instruments that can be configured to meet specific application requirements.
Single Particle Optical Sizing (SPOS)
The Integris AccuSizer operates on the principle of single particle optical sizing (SPOS). This technique generates high precision, high resolution particle size distribution results as well as particle / ml concentration data. The AccuSizer platform includes several configurations designed to meet a wide range of applications, including laboratory and in-line systems. Several sensor options cover a wide range of particle sizes and concentration limits. The advanced fluidics modules can process low concentration samples requiring no dilution for highly concentrated inks and CMP slurries using our patented two-stage exponential dilution system.
Dynamic light scattering
The Nicomp Dynamic Light Scattering (DLS) system measures particle size below 1nm and zeta potential to study particle charge. Nicomp’s unique algorithm provides the highest resolution results for samples containing more than one peak. Other unique capabilities include autodilution and autosamplers to facilitate high sample throughput.
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